Dr. Miroslav Haluska

Dr.  Miroslav Haluska

Dr. Miroslav Haluska

Lecturer at the Department of Mechanical and Process Engineering

ETH Zürich

Chair in Micro and Nanosystems

CLA G 3

Tannenstrasse 3

8092 Zürich

Switzerland

Additional information

Dr. Miroslav Haluska is currently a Senior Research Scientist at Micro and Nanosystems group at Swiss Federal Institute of Technology (ETH) Zürich. He is active in research, teaching, scientific service management, and in various MNS group and ETH activities. He performs interdisciplinary research mostly in fields of material science and process engineering with focus on carbon nanostructured materials.

Dr. Miro Haluska received his diploma from the Slovak Technical University in Bratislava. He gained a doctor degree in physics from the University of Vienna. Later he worked as a postdoc and visiting researcher at von Klitzing Department at Max Planck Institute in Stuttgart, Department of Physics at Wake Forest University, and at Eindhoven University of Technology in the group of Nano- and Micro- Scale Engineering. In May 2009, he joined the Prof. Ch. Hierold’s group of Micro and Nanosystems at ETH Zurich. He has authored or co-authored more than hundred peer- reviewed research papers in journals and conference proceedings, including publications in top journals (Science, Nature nanotechnology, Nano Letters, Advanced Materials, Angewandte Chemie, Nanoscale, Physical Review Letters, …). He has given more than twenty invited lectures at conferences, scientific institutions and universities.

The teaching activities at ETH includes co-lecturing for the Microsystem Technology I course and for Embedded MEMS lab course as well as providing tutorials of Microsystem Technology I.  He is active in supervising and reviewing student projects of different types, from PhD projects through master and bachelor thesis projects to various semester projects and studies.

His service for scientific society includes co-organizing various workshops (COST workshops, Raman workshops, Prof. M. Dresselhaus’ (MIT) colloquium at ETH) and managing the operation of the FIRST-CLA clean room infrastructure.

Course Catalogue

Spring Semester 2024

Number Unit
151-0620-00L Embedded MEMS Lab
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