Welcome to the Group of Micro and Nanosystems

News

29.07.2011 - Yunjia Li et al. article (»») makes it to the cover page of the July 2011 issue of JMM!

21.01.2011 - Dr. Thomas Helbling was awarded a Silver ETH Medal for his outstanding doctoral thesis!

16.09.2010 - Prof. Dresselhaus will give a lecture at ETH entitled "Why Are We So Excited about Carbon Nanostructures?" (announcement)

"TURNING PROPERTIES INTO FUNCTIONS" - In our group basic engineering research is dedicated to the exploration of new methods and processes for the utilization of material properties for functional devices and future products. This incorporates research on new materials for novel devices, on modelling and simulation of device characteristics and on reproducible fabrication processes for system integration and innovations. Our understanding of micro and nanosystems is based on the widely accepted definition of microsystems. Accordingly we consider nanosystems as systems involving electronic and non-electronic elements and functions on the nano scale for sensing, actuation, signal processing, interfaces, and displays. The system definition also includes aspects like design, modelling, simulation, fabrication, reproducibility, system partitioning, package, characterization, test, stability and reliability.

Research activities of our group are centred on three focus areas: Nanotransducers and Nanosystems, New Materials for MEMS, and Advanced Microsystems.

Education and teaching on Micro and Nanosystems is a core activity of our group. We offer courses from the basics of microsystems technology to a practical course for hands-on-MEMS experience. We contribute to the Bachelor and Master Programs of the Departments of Mechanical and Process Engineering (MAVT), Information Technology and Electrical Engineering (ITET) and Physics (PHYS). A specialized Master Program in Micro and Nanosystems will jointly be offered by D-MAVT and D-ITET starting in winter semester 2006/07.