Earlier than 2004

C. Hierold, B. Clasbrummel, D. Behrend, T. Scheiter, M. Steger, K. Oppermann, H. Kapels, E. Landgraf, D. Wenzel, and D. Etzrodt, "Low power integrated pressure sensor system for medical applications", Sensors And Actuators A-Physical, vol. 73, pp. 58-67, 1999.   external pageURL 

T. Scheiter, H. Kapels, K. G. Oppermann, M. Steger, C. Hierold, W. M. Werner, and H. J. Timme, "Full integration of a pressure-sensor system into a standard BiCMOS process", Sensors And Actuators A-Physical, vol. 67, pp. 211-214, 1998.   external pageURL

T. Scheiter, M. Biebl, C. Hierold, and H. Klose, "Rapid thermal annealing of doped silicon films to relax intrinsic stress", Sensors And Materials, vol. 8, pp. 445-454, 1996.   external pageURL

C. Hierold, A. Hildebrandt, U. Naher, T. Scheiter, B. Mensching, M. Steger, and R. Tielert, "A pure CMOS surface-micromachined integrated accelerometer", Sensors And Actuators A-Physical, vol. 57, pp. 111-116, 1996.   external pageURL

F. Kozlowski, N. Lindmair, T. Scheiter, C. Hierold, and W. Lang, "A novel method to avoid sticking of surface-micromachined structures", Sensors And Actuators A-Physical, vol. 54, pp. 659-662, 1996.   external pageURL

M. Biebl, T. Scheiter, C. Hierold, H. Philipsborn, H. Vonphilipsborn, and H. Klose, "Micromechanics Compatible With An 0.8 Mu-M Cmos Process", Sensors And Actuators A-Physical, vol. 47, pp. 593-597, 1995.   external pageURL

G. Horner and C. Hierold, "Gas-Analysis By Partial Model-Building", Sensors And Actuators B-Chemical, vol. 2, pp. 173-184, 1990.   external pageURL

C. Hierold and R. Muller, "Quantitative-Analysis Of Gas-Mixtures With Non-Selective Gas Sensors", Sensors And Actuators, vol. 17, pp. 587-592, 1989.   external pageURL

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