Earlier than 2004

Main content

2003

C. Hierold, "Micro- and Nanosystems: Review and Outlook", in Proceedings of the 14th Micromechanics Europe Workshop (MME03), November 2-4, Delft, The Netherlands, pp. 101-104, 2003.

Earlier Publications

C. Hierold, "Intelligent CMOS sensors", in Proceedings of the 13th Annual International Conference on Micro-Electro-Mechanical-Systems (MEMS2000), January 23-27, Miyazaki, Japan, pp. 1-6, 2000.

B. Clasbrummel, B. Jettkant, G. Muhr, C. Hierold, and J. Zacheja, "Measurement of Blood Pressure with an Implantable Telemetric Endosystem in the Rabbit Femoral Artery", in Proceedings of the European Medical and Biological Engineering Conference (EMBEC), November 4-7, Vienna, Austria, pp. 1446-1447, 1999.

H. Kapels, C. Hierold, D. Maier-Schneider, and R. Schneider, "Full Characterization and Long-Term Stability of Standard CMOS Materials for Integrated Micromechanical Applications", in Proceedings of The 29th European Solid-State Device Research Conference  (ESSDRC'99), September 13-15, Leuven, Belgium, pp. 316-319, 1999, The 13th European Conference on Solid-State Transducers (Eurosensors XIII), September 12-15, The Hague, The Netherlands, pp. 393-396, 1999.

S. Jung, C. Hierold, T. Scheiter, P. W. von Basse, R. Thewes, K. Goser, and W. Weber, "Intelligent CMOS Fingerprint Sensors", in Digest of Technical Papers of the 10th International Conference on Solid-State Sensors and Actuators (Transducers'99), June 7-10, Sendai, Japan, pp. 966-969, 1999.

T. Scheiter, C. Hierold, and H. J. Timme, "Pure CMOS microsystems - the Siemens approach for low cost microsystems in high volume markets", in Proceedings of the Microsystem Symposium, September 10-11, Delft, The Netherlands, pp. 77-85, 1998.

C. Hierold, T. Scheiter, and H. J. Timme, "CMOS-kompatible Oberflächenmikromechanik: Schlüsseltechnologie für integrierte Mikrosysteme", ITG Fachbericht 148, Sensoren und Meßtechnik, ITG-Fachtagung, March 9-11, Bad Nauheim, Germany, pp. 15-21, 1998.

C. Hierold, B. Clasbrummel, D. Behrend, T. Scheiter, M. Steger, K. Oppermann, H. Kapels, E. Landgraf, D. Wenzel, and D. Etzrodt, "Implantable low power integrated pressure sensor system for minimal invasive telemetric patient monitoring", IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems (MEMS98), January 25-29, Heidelberg, Germany, pp. 568-573, 1998.

H. Kapels, T. Scheiter, C. Hierold, R. Aigner, and J. Binder, "Cavity pressure determination and leakage testing for sealed surface micromachined membranes: a novel on-wafer test method", in Proceedings of the 11th Annual International Workshop on Micro Electro Mechanical Systems (MEMS98), January 25-29, Heidelberg, Germany, pp. 550-555, 1998.

T. Scheiter, U. Näher, and C. Hierold, "Sticktion-free sacrificial oxide etching in gaseous HF, a quantitative model and its application", in Proceedings of the 11th European Conference on Solid-State Transducers (Eurosensors XI), September 21-24, Warsaw, Poland, 1997.

K. Abraham-Fuchs, W. Gumbrecht, C. Hierold, and A. Steckenborn, "Multiparameter Sensor Microsystem – from Research towards a Mass Product?", International Congress Sensor ’97, May 13-15, Nürnberg, Germany, 1997.

H. J. Timme, D. Draxelmayr, C. Hierold, S. Kolb, D. Maier-Schneider, E. Pettenpaul, T. Scheiter, M. Steger, and W. M. Werner, "Monolithic pressure sensor microsystems", International Congress Sensor ’97, May 13-15, Nürnberg, Germany, 1997.

T. Scheiter, M. Steger, C. Hierold, K. G. Oppermann, S. Kolb, D. Maier-Schneider, and W. M. Werner, "A pure BiCMOS pressure sensor system with SD-readout circuitry and digital output", GMM-Fachtagung Mikroelektronik, March 4-5, Munich, Germany, pp. 27-32, 1997.

M. Steger, G. Nebel, J. Sauerbrey, T. Scheiter, R. Noe, and C. Hierold, "A monolithic mP-ready SD-readout-circuit with integrated capacitive sensors", in Proceedings of the International Conference on Advanced Microsystems for Automotive Applications, December 2-3, Berlin, Germany, 1996.

H. C. Eccardt, K. Niederer, T. Scheiter, and C. Hierold, "Surface micromachined ultrasound transducers in CMOS technology", in Proceedings IEEE Ultrasonics Symposium, November 3-6, San Antonio, USA, pp. 959-962, 1996.

C. Hierold, A. Hildebrandt, U. Näher, T. Scheiter, B. Mensching, M. Steger, and R. Tielert, "A pure CMOS surface micromachined integrated accelerometer", in Proceedings IEEE 9th Annual International Workshop on Micro-Electro-Mechanical Systems (MEMS96), February 11-15, San Diego, USA, pp. 174-179, 1996.

F. Kozlowski, N. Lindmair, T. Scheiter, C. Hierold, and W. Lang, "A novel method to avoid sticking of surface micromachined structures", in Proceedings of the 8th International Conference on Solid-State Sensors and Actuators (Transducers95, Eurosensors IX), June 25-29, Stockholm, Sweden, pp. 220-223, 1995.

M. Biebl, T. Scheiter, C. Hierold, H. V. Philipsborn, and H. Klose, "Micromechanics compatible with an 0.8 mm CMOS process", in Proceedings of the 8th European Conference on Solid-State Transducers (Eurosensors VIII), September 25-28, Toulouse, France, pp. 181-184, 1994.

T. Scheiter, M. Biebl, C. Hierold, and H. Klose, "VLSI-compatible stress-annealing in doped silicon films", in Proceedings of the 24th European Solid State Device Research Conference (ESSDERC'94), September 11-15, Edinburgh, UK, 1994.

C. Hierold and W. Kiffe, "Insulated Gate Bipolar Transistor (IGBT) with a Monlithic Integrated Current Mirror – Performance and Measurements", in Proceedings of the 6th International Conference on Power Semiconductors and Their Applications (Electronica '92), November 11-15, Munich, Germany, 1992.

C. Hierold and G. Horner, "Accuracy of Gas Analsysis with Arrays of Non-Selective Chemosensors", in Proceedings of the 3rd International Meeting on Chemical Sensors, September 24-26, Cleveland, USA, pp. 346-349, 1990.

 
 
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