Welcome to the homepage of Micro and Nanosystems



24.7.2014 - Marie Francine, Alexandre, Cyril and Daniel place second at the 2014 International Contest of Application in Nano-micro Technology (iCAN'14, Congratulations for this great achievement!
18.11.2013 - GreenTEG's heat flux sensor receives a Product Award from the Swiss Excellence Stiftung!
11.11.2013 - Dr. Clementine Boutry receives an ETH Medal for her outstanding doctoral work!

27.10.2006 VJNano - Recent Publication in APL 89, 163506 (2006), has been selected for the October 30, 2006 issue of Virtual Journal of Nanoscale Science & Technology »»
20.10.2006 Talk - "Electromechanical Transducers based on Single-Walled Carbon Nanotubes", Christoph Stampfer, Micro and nanosystems, ETH Zurich, 13:30-14:30, CAB H56 »»
17.10.2006 S. Schmid et al., "Non-Conductive Polymer Microresonators Actuated by the Kelvin Polarisation Force," Applied Physics Letters, vol. 89, pp. 163506, 2006 »»
17.10.2006 Micro and Nanosystems Fridaytalks WS 2006: preliminary schedule available »»
01.10.2006 Welcome to our new group member Dr. Cosmin Roman who will work on modelling and simulation of CNT based sensors.
21.09.2006 C. Stampfer et al., "Micromachined pressure sensors for electromechanical characterization of carbon nanotubes," Physica Status Solidi B, in press, corrected proof, 2006 »»
14.09.2006 A. Jungen et al., "A method for enhanced analysis of specific as-grown carbon nanotubes," Physica Status Solidi B, In press, corrected proof, 2006 »»
22.06.2006 update of available student projects »»
21.06.2006 Talk - "Micro and nanofluidics: transport and detection of cells and molecules", Prof. Philippe Renaud, Institute of Microelectronics and Microsystems, EPFL, 13:00-14:00, CLA J1 »»
16.06.2006 Talk - "Microtools for Nanotechnology: A detailed look at Nanostencil lithography", Prof. Juergen Brugger, Microsystems Laboratory (LMIS), EPFL, 13:00-14:00, CAB H56 »»
06.06.2006 C.Stampfer, A. Jungen, C. Hieroild: "Fabrication of Discrete Nanoscaled Force Sensors Based on Single-Walled Carbon Nanotubes", IEEE Sensors Journal, Vol. 6 (3), pp. 613-617, 2006 »»
26.05.2006 VJNano - Recent Publication in APL 88, 191901 (2006), has been selected for the May 29, 2006 issue of Virtual Journal of Nanoscale Science & Technology »»
Talk - "NEMS need MEMS", Prof. Nico deRooij, Sensors, Actuators and Microsystems Laboratory, University of Neuchâtel, 13:00-14:00, CAB H56 »»
Sensitive: A carbon nanotube based micro-strain-sensor, ETH life »»
Micro and Nanosystems: Seminar Program 2006 announced »»
'Nanowerk Spotlight' article on our recent publication "Process integration of CNTs into MEMS", A. Jungen et al. . Sens. Actuators A-physical, in press (2006) »»
Update of course informations on Studies on Micro and nanosystems for SS06 »»
NATURE MATERIALS: Comment on "Fabrication of single-walled carbon-nanotube-based pressure sensors", C. Stampfer et al. . Nano Lett. 6, 233–237 (2006) »»
28.02.2006 "The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems", Marie K. Tripp et al., Sensors and Actuators A: Physical 2006 »»
24.02.2006 Seminar - "Determination of chiral indices and electronic transition energies in carbon nanotubes" »»
Prof. Christian Thomsen, Institut für Festkörperphysik, TU Berlin, Germany
14:00-15:00, CLA J1
17.02.2006 Seminar - "Overview of Center for Wireless integrated Microsystems (WIMS) at the University of Michigan" »»
Prof. Khalil Najafi, Center for Wireless integrated Microsystems, University of Michigan, USA
14:00-15:00, CLA J1
10.02.2006 Seminar - “Controlled Fe and Ni-nanoparticle formation on SiO2-substrate as catalysts for CNT growth”
Lukas Durrer, Micro and Nanosystems, ETH Zurich, Switzerland
14:00-15:00, CLA J1
27.01.2006 Seminar - “Towards miniaturized CNT pressure sensors based on mm-Membranes”
Thomas Helbling, Micro and Nanosystems, ETH Zurich, Switzerland
14:00-15:00, CLA J1
22.01.2006 Conference - IEEE MEMS 2006, Istanbul, Turkey
"Fabrication of Single-Walled Carbon-Nanotube-Based Pressure Sensors", C. Stampfer et al., Nanoletters 2006 »»
"Fabrication and characterization of folded SU-8 suspensions for MEMS applications", D. Bachmann et al.,  Sensors and Actuators A: Physical 2006 »»
13.01.2006 Seminar - “Applications and usage of the confocal Raman microscope”
Alain Jungen, Micro and Nanosystems, ETH Zurich, Switzerland
14:00-15:00, HG F33.5

Wichtiger Hinweis:
Diese Website wird in älteren Versionen von Netscape ohne graphische Elemente dargestellt. Die Funktionalität der Website ist aber trotzdem gewährleistet. Wenn Sie diese Website regelmässig benutzen, empfehlen wir Ihnen, auf Ihrem Computer einen aktuellen Browser zu installieren. Weitere Informationen finden Sie auf
folgender Seite.

Important Note:
The content in this site is accessible to any browser or Internet device, however, some graphics will display correctly only in the newer versions of Netscape. To get the most out of our site we suggest you upgrade to a newer browser.
More information

© 2014 ETH Zurich | Imprint | Disclaimer | 7 February 2008