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News
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24.1.2013 - Matthias Muoth, Kiran Chikkadi and Yu Liu won the Outstanding Poster Paper Award at IEEE MEMS 2013 for the paper
SUSPENDED CNT-FET PIEZORESISTIVE STRAIN GAUGES: CHIRALITY ASSIGNMENT AND QUANTITATIVE ANALYSIS |
| 09.11.2012 - Valentin Döring and Matthias Muoth get mentioned in Oltener Tagblatt for their contribution to the TecDay! |
| 21.09.2012 - Tobias Süss receives a Poster Prize Award for his work presented at the MME 2012 workshop! |
| 19.07.2012 - Symposium with groups of Prof. Brugger (EPFL) and Prof. Wood (ETHZ) (agenda: »») |
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Wiki of Micro and Nanosystems (intranet)
Open Bachelor, Master, and Diploma Projects
Courses offered by the Micro and Nanosystems Group
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General informations for lecturers and tutors
General informations for doctoral students
| 27.10.2006 | VJNano - Recent Publication in APL 89, 163506 (2006), has been selected for the October 30, 2006 issue of Virtual Journal of Nanoscale Science & Technology »» |
| 20.10.2006 | Talk - "Electromechanical Transducers based on Single-Walled Carbon Nanotubes", Christoph Stampfer, Micro and nanosystems, ETH Zurich, 13:30-14:30, CAB H56 »» |
| 17.10.2006 | S. Schmid et al., "Non-Conductive Polymer Microresonators Actuated by the Kelvin Polarisation Force," Applied Physics Letters, vol. 89, pp. 163506, 2006 »» |
| 17.10.2006 | Micro and Nanosystems Fridaytalks WS 2006: preliminary schedule available »» |
| 01.10.2006 | Welcome to our new group member Dr. Cosmin Roman who will work on modelling and simulation of CNT based sensors. |
| 21.09.2006 | C. Stampfer et al., "Micromachined pressure sensors for electromechanical characterization of carbon nanotubes," Physica Status Solidi B, in press, corrected proof, 2006 »» |
| 14.09.2006 | A. Jungen et al., "A method for enhanced analysis of specific as-grown carbon nanotubes," Physica Status Solidi B, In press, corrected proof, 2006 »» |
| 22.06.2006 | update of available student projects »» |
| 21.06.2006 | Talk - "Micro and nanofluidics: transport and detection of cells and molecules", Prof. Philippe Renaud, Institute of Microelectronics and Microsystems, EPFL, 13:00-14:00, CLA J1 »» |
| 16.06.2006 | Talk - "Microtools for Nanotechnology: A detailed look at Nanostencil lithography", Prof. Juergen Brugger, Microsystems Laboratory (LMIS), EPFL, 13:00-14:00, CAB H56 »» |
| 06.06.2006 | C.Stampfer, A. Jungen, C. Hieroild: "Fabrication of Discrete Nanoscaled Force Sensors Based on Single-Walled Carbon Nanotubes", IEEE Sensors Journal, Vol. 6 (3), pp. 613-617, 2006 »» |
| 26.05.2006 | VJNano - Recent Publication in APL 88, 191901 (2006), has been selected for the May 29, 2006 issue of Virtual Journal of Nanoscale Science & Technology »» |
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19.05.2006 |
Talk - "NEMS need MEMS", Prof. Nico deRooij, Sensors, Actuators and Microsystems Laboratory, University of Neuchâtel, 13:00-14:00, CAB H56 »» |
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29.03.2006 |
Sensitive: A carbon nanotube based micro-strain-sensor, ETH life »» |
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21.03.2006 |
Micro and Nanosystems: Seminar Program 2006 announced »» |
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17.03.2006 |
'Nanowerk Spotlight' article on our recent publication "Process integration of CNTs into MEMS", A. Jungen et al. . Sens. Actuators A-physical, in press (2006) »» |
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14.03.2006 |
Update of course informations on Studies on Micro and nanosystems for SS06 »» |
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02.03.2006 |
NATURE MATERIALS: Comment on "Fabrication of single-walled carbon-nanotube-based pressure sensors", C. Stampfer et al. . Nano Lett. 6, 233–237 (2006) »» |
| 28.02.2006 | "The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems", Marie K. Tripp et al., Sensors and Actuators A: Physical 2006 »» |
| 24.02.2006 |
Seminar - "Determination of chiral indices and electronic transition
energies in carbon nanotubes" »» Prof. Christian Thomsen, Institut für Festkörperphysik, TU Berlin, Germany 14:00-15:00, CLA J1 |
| 17.02.2006 |
Seminar - "Overview of Center for
Wireless integrated Microsystems (WIMS) at
the University of
Michigan" »» Prof. Khalil Najafi, Center for Wireless integrated Microsystems, University of Michigan, USA 14:00-15:00, CLA J1 |
| 10.02.2006 |
Seminar - “Controlled Fe and Ni-nanoparticle formation on SiO2-substrate as catalysts for CNT growth” Lukas Durrer, Micro and Nanosystems, ETH Zurich, Switzerland 14:00-15:00, CLA J1 |
| 27.01.2006 |
Seminar - “Towards miniaturized CNT pressure sensors based on mm-Membranes” Thomas Helbling, Micro and Nanosystems, ETH Zurich, Switzerland 14:00-15:00, CLA J1 |
| 22.01.2006 | Conference - IEEE MEMS 2006, Istanbul, Turkey |
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21.01.2006 |
"Fabrication of Single-Walled Carbon-Nanotube-Based Pressure Sensors", C. Stampfer et al., Nanoletters 2006 »» |
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20.01.2006 |
"Fabrication and characterization of folded SU-8 suspensions for MEMS applications", D. Bachmann et al., Sensors and Actuators A: Physical 2006 »» |
| 13.01.2006 |
Seminar - “Applications and usage of the confocal Raman microscope” Alain Jungen, Micro and Nanosystems, ETH Zurich, Switzerland 14:00-15:00, HG F33.5 |
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