Master in Micro and Nanosystems
The Department of Mechanical and Process Engineering and the Department of Information Technology and Electrical Engineering combine efforts in a new and joint master’s program.
The Master of Science program in Micro and Nanosystems offers a world-class, future-oriented education for excellent bachelor graduates from all over the world. The interdisciplinary program is centered on mechanical and electrical engineering courses of importance for micro and nanosystems engineers, complemented by courses in physics, chemistry, biology, material science, computational science, business administration and management.
Master students, who are interested in the specialization Micro and Nanosystems are advised to visit the homepage of the program here.
The Chair offers the following courses:
151-0172-00L Microsystems II: Devices and Applications
Lecturers: Hierold, C. / Roman, C.
Description: The students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS), basic electronic circuits for sensors, RF-MEMS, chemical microsystems, BioMEMS and microfluidics, magnetic sensors and optical devices, and in particular to the concepts of Nanosystems (focus on carbon nanotubes), based on the respective state-of-research in the field. They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.
Course schedule and learning materials for FS 2024 will be available for the enrolled students in mystudies.
151-0620-00L Embedded MEMS Lab
Lecturers: Haluska, M. and staff
Description: In this practical course, students are introduced to the process steps required for the fabrication of MEMS (Micro Electro Mechanical System) and carry out the fabrication and testing steps in the clean rooms themselves. Additionally, they learn the requirements for working in clean rooms. Processing and characterization will be documented and analyzed in a final report. Limited access, see "Besonderes."
Class handouts, lectures and other content for FS 2024 will be available for the enrolled students in mystudies.
151-0642-00L Seminar on Micro and Nanosystems
Location: For FS 2024 the seminars will usually be held Fridays, 13:30, in room CLA G 2.
Check our Events page for the next coming seminar.
151-0621-00L Microsystems I: Process Technology and Integration
Lecturers: Hierold, C. / Haluska, M.
Description: Students are introduced to the fundamentals of semiconductors, the basics of micromachining and silicon process technology and will learn about the fabrication of microsystems and -devices by a sequence of defined processing steps (process flow).
The course schedule and learning materials will be updated for HS 2024.
151-0409-00L Multiphysics Modeling and Simulation
Lecturers: Roman, C.
Description: This class introduces theoretical and practical aspects related to the modeling and simulation of multiphysics systems. Students will learn how to set up a multiphysics model from scratch, in a systematic fashion, and thus avoid frustrating pitfalls that come with trial-and-error. Comsol Multiphyics will be utilized to apply the concepts learned during the lectures to solve exercises.
The course schedule and learning materials will be updated for HS 2024.